The Study of Defects in Oxide Semiconductor
碩士 === 大葉大學 === 電機工程學系 === 101 === In this study, we investigated the ZnO film using Rrapid Thermal Chemical Vapor Deposition (RTCVD). The optical transmittance of the thin film can reach to average 80%. In Atomic Force Microscope (AFM), we can observed that some of the region were collapsed. The co...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/58962061033278820463 |