Hybrid Optical Proximity Correction with Hotspot Detection
碩士 === 中原大學 === 資訊工程研究所 === 101 === In recent years, semiconductor manufacturing process has made great progress. The feature size of IC had been smaller than the lithography wavelength. In consideration of the aspect of physical optics, it might make a severe impact on the IC manufacturing process...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41721643759037369944 |