The drilling performance and hole quality of multilayer diamond-like carbon deposited on micro-drill
碩士 === 建國科技大學 === 自動化工程系暨機電光系統研究所 === 101 === The study is to research the drilling performance of a-C:H:Zr coatings prepared by sputtering graphite ,zirconium targets ,CH4 and C2H2 used unbalanced magnetron sputtering system. The stusy contains three stages .The objective is study the influence of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/98817249896773949509 |