Study on Thermoelectric Effect of Polysilicon Piezoresistive Properties and Its Stress Sensor Application
碩士 === 正修科技大學 === 電子工程研究所 === 101 === The these is to study on the thermoelectric effect of polysilicon piezoresistive properties and its stress sensor application. Firstly, we design the testkey of the polysilicon film to explore the thermoelectric effect of Seebeck coefficient. Moreover, the testk...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/12341731295255298067 |