The Characteristics of Zn-In-Sn-O (ZITO) Thin Film Transistor Using Co-sputtering Technique
碩士 === 長庚大學 === 電子工程學系 === 101 === We employed a cosputtering technique, because it is an effective technique for a multicomponent film to control the film chemical composition in a systematic and easy way. we studied the optical and electron-transport properties of a ZITO system because there h...
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Format: | Others |
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2013
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Online Access: | http://ndltd.ncl.edu.tw/handle/99431724041189391623 |