The Fabrication of Periodical Nanostructures on CIGS Thin Film Solar Cell
碩士 === 國立中正大學 === 光機電整合工程研究所 === 101 === In this study, the laser interference lithography and wet etching process on CIGS thin film has been discussed. We used laser interference lithography technique and dry etching to transfer the square and the hexagon periodical pattern nanostructures on Copper...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41553086891462978016 |