Using Sol-Gel and Hydrothermal Method to Fabricate ZnO Nanostructure and its Gas Sensing Application
碩士 === 國立中正大學 === 化學工程研究所 === 101 === In this study, ZnO was synthesized on SiO2 substrate and Microelectromechanical system was conducted to fabricate the gas sensors. The performance of gas sensors was demonstrated using a diluted NH3 in a variety of operational conditions. The experiments are div...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/57837700072727686881 |