Study on the Etching Process of Infrared Imaging Device
碩士 === 國防大學理工學院 === 電子工程碩士班 === 101 === In this thesis, we mainly discuss the etching fabrication of infrared imaging devices, such as focal plane arrays (FPAs) which is one of the most promising infrared and a GaAs/AlGaAs based Quantum well infrared photodetector(QWIP) FPA. These devices are extend...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/70861048233050891035 |