Fabrication and Characterization of Yttria Stabilized Zirconia Oxide SOFC Electrolytes Thin Film Deposited by RF Magnetron Sputtering
碩士 === 國立臺北科技大學 === 材料及資源工程系研究所 === 100 === In this study, electrolyte of Yttria-stabilized Zirconia (YSZ) films was prepared on NiO-SDC anode substrate by magnetron RF sputtering at oxygen and argon atmosphere. Various thicknesses of electrolyte films ranging from 1.8 ?m to 10.5 ?m were deposit...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/7387uj |