A Study on the Design and Process of CMOS Flip-Chip Micro Fluxgate Magnetometers
碩士 === 國立臺北科技大學 === 機電整合研究所 === 100 === This paper presents a dual-core (Förster-type) micro-fluxgate magnetic field sensor fabricated on a silicon chip based on CMOS technology, electroless plating and flip-chip technology. The silicon chip is 2.5 mm × 2.5 mm in dimension. The sensor consists of ma...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/jma636 |