Design and Fabrication of RF MEMS Probe Card
碩士 === 國立臺北科技大學 === 機電整合研究所 === 100 === For the recent development of Semiconductor process, the base substrate in general is the silicon. Although the silicon process is quite mature in Taiwan but the high frequency parasitic effects and reflection phenomenon of silicon still needs to be improved....
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/ng7f25 |