Study of AZO Transparent Conducting Filmsby Reactive Cosputtering
碩士 === 國立臺北科技大學 === 材料科學與工程研究所 === 100 === In this study, reactive magnetron sputtering on glass substrates, use of the pure aluminum and pure zinc reacts with oxygen deposited aluminum doped zinc oxide (AZO) transparent conductive films, compared with AZO ceramic target, the vacuum chamber must pas...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/7js828 |