Development of chromatic confocal interferometry measurement methodology for 3D surface profilometry

• Main Authors: Yi-Shiuan Chen, 陳奕璇
• Other Authors: 陳亮嘉
• Format: Others
• Language: zh-TW
• Published: 2012
• Online Access: http://ndltd.ncl.edu.tw/handle/8467c2

碩士 === 國立臺北科技大學 === 自動化科技研究所 === 100 === In this research, new nano-scale measurement methodology based on spectrally-resolved chromatic confocal interferometry (SRCCI) was successfully developed by employing integration of chromatic confocal sectioning and spectrally-resolve white light interferometry (SRWLI) for microscopic three dimensional surface profilometry. The proposed chromatic confocal method (CCM) using a broad band while light in combination with a specially designed chromatic dispersion objective is capable of simultaneously acquiring multiple images at a large range of object depths to perform surface 3-D reconstruction by single image shot without vertical scanning and correspondingly achieving a high measurement depth range up to hundreds of micrometers. A Linnik-type interferometric configuration based on spectrally resolved white light interferometry is developed and integrated with the CCM to simultaneously achieve nano-scale axis resolution for the detection point. The white-light interferograms acquired at the exit plane of the spectrometer possess a continuous variation of wavelength along the chromaticity axis, in which the light intensity reaches to its peak when the optical path difference equals to zero between two optical arms.