Development of chromatic confocal interferometry measurement methodology for 3D surface profilometry
碩士 === 國立臺北科技大學 === 自動化科技研究所 === 100 === In this research, new nano-scale measurement methodology based on spectrally-resolved chromatic confocal interferometry (SRCCI) was successfully developed by employing integration of chromatic confocal sectioning and spectrally-resolve white light interferome...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/8467c2 |