The Fabrication of Porous Silicon Lateral Sensors and The Study of Plasma Enhancement
碩士 === 中國文化大學 === 化學工程與材料工程學系奈米材料碩士班 === 101 === In this study‚ silicon is used for the electrochemical etching to produce porous silicon structure. The porous silicon sample is measured by UV, PL, SEM and I-V. The membrane material has the characteristics of high-surface area ratio, high impedance,...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65232185142766381756 |