| Summary: | 碩士 === 國立虎尾科技大學 === 自動化工程研究所 === 100 === In the micro-nano fabrication technology, the working motions are classified as linear motion and rotary motion. Because the development of the latter mainly depends on multi-axis equipment and Roll to Roll (R2R) equipment, the positioning accuracy of rotating axis is very important in the precision machinery. At present, the main problems consist in positioning errors of rotating axis and measuring errors of roundout.
Therefore, aiming the above existing problems in this project of two system, the small angular errors by piezoelectric transducer (PZT) stage will be compensated in order to enhance positioning accuracy of rotating axis, and the optical rotary measurement system will be developed with the optical lever theorem and the half- reversal technique to reduce centering error of rotating axis. The subsystems will be developed in the, which include a high-precision rotary piezoelectric indexing table, a high-precision multi-DOF single-axis piezoelectric stage, an optical rotary measurement system with ball lens, and a multi-DOF laser interferometer feedback system.
In the second system, this paper presents the assembly of a nano PZT stage with interferometer feedback using multi PZT stage control system. This nano-stage integrates a single-axis long-stroke stage of linear displacement platform and a PZT stage by using piezoelectric actuator. The linear displacement platform can’t be controlled at high accuracy, thus, the Positioning error PZT stage is designed to compensate yaw errors in order to achieve the.
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