Development of a High Precision Technique for the Linear and Rotary Stage
碩士 === 國立虎尾科技大學 === 自動化工程研究所 === 100 === In the micro-nano fabrication technology, the working motions are classified as linear motion and rotary motion. Because the development of the latter mainly depends on multi-axis equipment and Roll to Roll (R2R) equipment, the positioning accuracy of rotatin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/m394uz |