Fabrication of MEMS Devices Using Non-semiconductor Manufacturing Process
碩士 === 國立聯合大學 === 機械工程學系碩士班 === 100 === The production of MEMS drives highly depends on the manufacturing process of semiconductor; hence, it also highly restricts the use and structure design of MEMS materials. To break through the limitation in materials and designs, the author intends to apply fe...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65633342807753092239 |