A Multiple Incident Angles Study Through Use of Imaging Ellipsometry
碩士 === 國立聯合大學 === 光機電整合產業專班 === 100 === This thesis presents an image ellipsometrywith a cylindrical lens to establish multiple incident angles of light for obtainingellipsometric parameters (Ψ,Δ)with different incident angles by measuring the intensities of light. The proposed configuration compris...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65188893356203911868 |