Research of Planarization and Friction Force Analysis on Lapping of Sapphire Wafers
碩士 === 國立臺灣科技大學 === 機械工程系 === 100 === LED has become a trend and widely being applied in daily life because of the rapid development of related industry and technology. Sapphire or monocrystalline alumina oxide substrates have been selected as a carrier plate for coating or vapor deposition of epit...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/3g5c7q |