Simulation and Analysis of an RF Induction Heating Furnace for Polycrystalline Silicon Growth

碩士 === 國立臺灣科技大學 === 電機工程系 === 100 === The vacuum induction melting and control solidification is a new developed process for the manufacture of polycrystalline silicon with the advantage of quick heating rate compared to the traditional resistance heating method. The parameters of the induction furn...

Full description

Bibliographic Details
Main Authors: Shih-chieh Cheng, 鄭仕傑
Other Authors: Kuo-Lung Lian
Format: Others
Language:zh-TW
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/01488272532032561354
Description
Summary:碩士 === 國立臺灣科技大學 === 電機工程系 === 100 === The vacuum induction melting and control solidification is a new developed process for the manufacture of polycrystalline silicon with the advantage of quick heating rate compared to the traditional resistance heating method. The parameters of the induction furnace play a key role in controlling the temperature of the melt of polycrystal silicon for solar cells. It is expensive and time-consuming to investigate experimentally how each parameter affects the silicon melt temperature. Therefore, numerical simulation is an economically feasible means to design an induction melting furnace. This thesis investigates several parameters of an induction furnace. These parameters include coatings on the graphite susceptor, geometries of the graphite suceptor, and the material of the cooling base plate. Numerical simulations show that: 1. Cooling base plate made of steel 304 yields the best heating efficiency; 2. The thicker the graphite susceptor, the higher the temperature is raised; 3. The more section the graphite susceptor divided, the lower the temperature of the susceptor is raised; 4. The bigger distance between two sections, the lower the temperature of the susceptor is raised; 5. The coating material at the outer surface of the susceptor should be the one with low thermal conductivity to prevent heat losses. On the other hand, the coating on the inner surface should be one with high thermal conductivity to allow easy heat transfer.