Simulation and Analysis of an RF Induction Heating Furnace for Polycrystalline Silicon Growth
碩士 === 國立臺灣科技大學 === 電機工程系 === 100 === The vacuum induction melting and control solidification is a new developed process for the manufacture of polycrystalline silicon with the advantage of quick heating rate compared to the traditional resistance heating method. The parameters of the induction furn...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01488272532032561354 |