Study on the Fabrication of Double-ended Quartz Resonator
碩士 === 國立臺灣大學 === 應用力學研究所 === 100 === The purpose of this thesis is to study Z-cut α-Quartz by using MEMS process technology to finish the quartz oscillator. We can design the size of mask for quartz oscillator and the shadow mask for electrode layer. We use MEMS process technology to evaporate meta...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/26910998130378450863 |