Fabrication of a tactile Scanning Probe for Micro/Nano CMM
碩士 === 國立臺灣大學 === 機械工程學研究所 === 100 === In this research, a high precision tactile 3D probe is proposed. Based on suspension mechanism with a stylus, the probe is able to detect the 3D displacement on the ball tip using optical sensors. Calibrations with a nano measuring and positioning machine prove...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/81646935564643397257 |