Effect of Specimen Temperature on C60+-Ar+ Co-Sputtering of Polymers
碩士 === 國立臺灣大學 === 材料科學與工程學研究所 === 100 === It is known that owing to high sputtering yield, cluster ions like C60+ produce more high-mass secondary ions and yield less damaged in the remaining surface than atomic ion sputtering. However, in some polymer, damage still accumulates with C60+ sputtering,...
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| Format: | Others |
| Language: | zh-TW |
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2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41814888682585372267 |