Design and Implementation of Low Thermal Drift and Low-Noise Capacitive Multi-Channel Sensing Interface CMOS-MEMS Accelerometers
博士 === 國立清華大學 === 奈米工程與微系統研究所 === 100 === There are many different fabrication processes for Micro-Electro-Mechanical System (MEMS). However, the standard fabrication process is a major factor which plays an important role in MEMS. In this study, a capacitive sensing chip is proposed to use TSMC 0.3...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/83365996554147688064 |