Design and Implementation of a CMOS Capacitive Micromachined Microphone
碩士 === 國立清華大學 === 電子工程研究所 === 100 === This work describes the design and implementation of a CMOS-MEMS capacitive microphone. The microphone with a novel micro-structure design has a high sensitivity in a small area. The post-process is simple and can be completed at low temperatures. Without additi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/48155384911716082868 |