Study and Application of Maskless Lithographic Patterns in Optical Far Field Using Modified Iterative Fourier Transform Algorithm
博士 === 國立清華大學 === 光電工程研究所 === 100 === We propose a method to generate two-dimensional phase-shift patterns (PSPs) in the optical far field using a holographic projection system (HPS), which can be used to fabricate non-periodic features. The field function of PSP is used as the target function to ca...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/15737006851722331021 |