Spatial Correlogram Approach for Classification of Wafer Bin Map Pattern in Semiconductor Manufacturing
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 100 === With the rapid development of semiconductor manufacturing technology, it is critical to control the production process effectively and minimize process variation for yield enhancement in semiconductor manufacturing industry. To ensure the assignable cause of...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/11279390327160567013 |