Investigation of allergy biosensor for human IgE detection using Sezawa-mode surface acoustic wave devices
碩士 === 國立中山大學 === 電機工程學系研究所 === 100 === In this study, Sezawa-mode surface acoustic wave (SAW) devices were employed to construct the allergy biosensor. To fabricate Sezawa-mode SAW devices, the RF magnetron sputtering method for the growth of piezoelectric ZnO thin films onto Si3N4/Si is adopted an...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95788828057848389422 |