A Study on Evaluation of Differential Pressure Setpoint of Chilled Water Pumps in Cleanroom HVAC Systems for Energy Saving in Electronic Semiconductor Manufacturing Plants
碩士 === 國立高雄海洋科技大學 === 輪機工程研究所 === 100 === Abstract Variable frequency speed control technologies have been widely used in chilled water pumps in cleanroom heating, ventilation and air conditioning (HVAC) systems in electronic semiconductor manufacturing plants to reduce energy consumption. All the...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/58497572888246083535 |