Fabrication of plasmonic crystal using two beam interference lithography
碩士 === 國立東華大學 === 光電工程學系 === 100 === In this paper, we mainly based on the traditional double-beam interference lithography to produce plasmonic crystals. According to the interference principle, we construct a maskless lithography setup based on laser interference. By Controlling the dual-beam...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Published: |
2012
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/gxf3gx |