Simulation of 20nm N-type SOI multiple-gate MOSFET gate leakage

碩士 === 國立東華大學 === 電機工程學系 === 100 === Many miniature scale device issues come out in recent years because of the scaling down of the devices. We simulated Semiconductor-On-Insulation MOSFET(SOI MOSFET) with the software TCAD for the cost saving study. The simulated device structure is 20nm N-type SOI...

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Bibliographic Details
Main Authors: Xin-Jie Huang, 黃新傑
Other Authors: Keng-Ming Liu
Format: Others
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/mdr8bu