Implementation of a Beam-Breaking Wafer Positioning System and Integration with Semiconductor Manufacturing Equipment
碩士 === 國立中央大學 === 光機電工程研究所 === 100 === This thesis implements a wafer positioning system for real-time detection of the center position of a moving wafer in a process chamber. Three pairs of optical sensors positioned along an axis transverse to the path of movement of wafer are employed in this waf...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10185583944336395476 |