Thickness and Surface Profile Measurement of Thin Film by Using Spatial Carrier Phase Shifting Technique
碩士 === 國立中央大學 === 光電科學研究所 === 100 === Our research is used to build a vibration-insensitive phase-shifting interferometer to measure optical constants of thin film. Two-dimensional surface profile, optical constants and thickness of thin film can be measured by this interferometry, which is a nondes...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/83835025297845104014 |