Fabrication of quartz micro-pillars using wet etching
碩士 === 國立中央大學 === 機械工程研究所 === 100 === Abstract Quartz has many remarkable characteristics such as piezoelectricity nature, high frequency, and thermal stability. It has been widely used as the main materials for oscillators, resonators, and surface acoustic wave filters. In recent years, quartz has...
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| Format: | Others |
| Language: | zh-TW |
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2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/20997152202725482986 |