Fabrication of Site- and Size-controllable Periodic Arrays 2D Well-ordered Si Nanostructures by Plasma Modified Nanosphere Lithography and Chemical Wet Etching Processes
碩士 === 國立中央大學 === 化學工程與材料工程研究所 === 100 === The present study has demonstrated the successful fabrication of density-, size- and shape-controllable Si nanostructure arrays on Si substrates of different orientation by using plasma modified nanosphere lithography and anisotropic wet etching process. T...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/23119866571253488366 |