The Study of Run-to-Run Control Applied to Semiconductor Manufacturing Mixed Product Processes
博士 === 國立交通大學 === 機械工程學系 === 100 === Recently, the exponentially weighted moving average (EWMA) controller had become a popular control method in Run-to-run (RtR) process control, but the issue of measurement noise from metrology tools had not been addressed in RtR EWMA controllers yet. This dissert...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/30287592991404643817 |