Measurement of Curvature and Stress in Deposited Sapphire Substrate Using Dual Beam Optical Method
碩士 === 國立交通大學 === 機械工程學系 === 100 === ABSTRACT Lattice misfit between the gallium nitride thin film and sapphire substrate often induces intrinsic stress in light-emitting diode (LED) wafers in the epitaxial process. Besides, the thermal mismatch also yields wafer bowing and residual stress in the t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/86745604016680971412 |