Accurate Modeling of Gate Electron Tunneling Current in Metal-Gate/High-K nMOSFET and nFinFET
碩士 === 國立交通大學 === 電子研究所 === 100 === High-K stacks can suppress the gate leakage current while a FinFET structure has benefits of improving the short channel effects. Gate tunneling current model has been established based on WKB approximation. In this thesis, an electron tunneling model through hi...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2011
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Online Access: | http://ndltd.ncl.edu.tw/handle/76989620165986964020 |