Accurate Modeling of Gate Electron Tunneling Current in Metal-Gate/High-K nMOSFET and nFinFET

碩士 === 國立交通大學 === 電子研究所 === 100 === High-K stacks can suppress the gate leakage current while a FinFET structure has benefits of improving the short channel effects. Gate tunneling current model has been established based on WKB approximation. In this thesis, an electron tunneling model through hi...

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Bibliographic Details
Main Authors: Chang, Lou-Hao, 張洛豪
Other Authors: Chen, Ming-Jer
Format: Others
Language:en_US
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/76989620165986964020