The Porogen Aggregation Behavior, Pore Size, And Size Control of Ultra-low-k Porous Organosilicate Films Based on MSQ/porogen Hybrid System
博士 === 國立交通大學 === 材料科學與工程學系 === 100 === This work focuses on the hybrid low-k film in a late-porogen removal scheme. There are three parts are discussed including: (1) the aggregation behavior of porogen in the hybrid film; (2) disperses the porogen in the low-k precursor and control the porogne siz...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/20456178289868972705 |