Study on the structure-property relationship of porous low-k dielectrics based on novel hybrid and nano-clustering materials
博士 === 國立交通大學 === 材料科學與工程學系 === 100 === This work examines the structure-property relationship of porous low-k dielectrics such as novel MSQ/high-temperature porogen hybrid materials and nano-clustering materials, and explores their integration feasibility for future technology node. Specificall...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/06319238663891195851 |