Electroless Deposition of Composite Ruthenium and Ruthenium Dioxide Thin Films on Conductors, Semiconductors, and Insulators
碩士 === 國立交通大學 === 材料科學與工程學系 === 100 === In this study, we explore the electroless deposition of composite Ru/RuO2 film on a variety of substrates including conductor (copper), semiconductor (silicon), as well as insulator (acrylonitril butadiene styrene and silicon dioxide). Due to their distinct su...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/39104380878238892081 |