Accuracy-Enhancement Schemes of Virtual Metrology
博士 === 國立成功大學 === 製造資訊與系統研究所碩博士班 === 100 === The advantages of virtual metrology are well-known, it cannot only monitor the product quality online and in real-time but it also is a very important factor for advanced process control (APC). Therefore, to achieve better real-time monitoring for enhanci...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2012
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/57130216872779574014 |