Fabrication microstructure and properties of ZnO and Al doped ZnO thin films
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 100 === In this study, we used the sol-gel method to prepare ZnO films and Al doped ZnO films on Si substrate at room temperature. We investigated how the number of multi-layer structure, annealing temperature and annealing time affect the ZnO films, and the Al dopin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/29637446555870728844 |