A study on fabrication, characterization and application of TiO2 and TiO2-SiO2 thin films
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 100 === Titanium oxide (TiOx) and titanium-silicon oxide (TiOx-SiO1-x) thin films were fabricated by sol gel process with various solution ratios and deposited on the Si (1 0 0) wafers by spin coating. Instead and compare of conventional furnace annealing at 500 and...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/76672483534907898055 |