A study on the microstructure and mechanical-electrical-optoelectronic properties of Ta-Si-N nanocomposite thin films
博士 === 國立成功大學 === 機械工程學系碩博士班 === 100
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2011
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/33204650904162918810 |