Research for Aluminum-Doped Zinc Oxide Thin Films by Ion Beam Assisted RF Magnetron Sputtering
碩士 === 國立成功大學 === 電機工程學系碩博士班 === 100
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2012
|
Online Access: | http://ndltd.ncl.edu.tw/handle/60680349570291568602 |