Research for Aluminum-Doped Zinc Oxide Thin Films by Ion Beam Assisted RF Magnetron Sputtering

碩士 === 國立成功大學 === 電機工程學系碩博士班 === 100

Bibliographic Details
Main Authors: Chen-KuanChang, 張陳冠
Other Authors: Chuan-Feng Shih
Format: Others
Language:zh-TW
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/60680349570291568602