Investigation of zinc indium tin oxide thin film transistors fabrication by co-sputtered system and their application
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 100 === In this dissertation, amorphous zinc indium tin oxide (a-ZITO) thin film transistors (TFTs) with different kinds of dielectric layers were fabricated and analysis of deep UV phototransistor investigated. First, we apply a-ZITO thin film as channel layer to...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/07210451779867715441 |