Nano-wear Behavior of Silicon Probes by Molecular Dynamics Simulation
碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 100 === While greater accuracy and finer resolution of microscopy techniques are imperatively needed, massive attention has been drawn to probe integrity studies. Silicon probe is chosen to be studied in this work. Various scratch tests are performed by molecular...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41130470433627324931 |